Like a standard mechatronics procedure, a MEMS machine constitutes of a micro sensor to experience a selected variable of our environment and converts the variable to an electric sign. This electric sign is processed by means of microelectronics which hence controls a micro-actuator to supply the necessary swap in environment.
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Extra resources for A Introduction to Microelectromechanical System (MEMS): ZigBee SystemTechnology
A Introduction to Microelectromechanical System (MEMS): ZigBee SystemTechnology